方向负责人：苗斌

中国科学院苏州纳米技术与纳米仿生研究所
高级工程师
MEMS工艺及微纳传感器开发方向负责人
邮箱：bmiao2013@sinano.ac.cn
地址：江苏省苏州市工业园区若水路398号

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负责人简介

研究方向为MEMS微纳加工技术及微纳传感器开发与产业化，主持KJW、苏州市科技计划、国家自然基金面上合作及院企横向项目二十余项、参与科技部国家重点研发计划，中科院联合基金、KJW等重大项目4项，主持项目经费超过450万元。第一发明人受理授权专利7项，一作/共一发表论文7篇，参与发表高水平论文14篇。

方向成员

博士生

徐瞻、商文玲

硕士生

王丹芮、姚术涛（联培）、塔桂峰（联培）、刘浩杰（联培）、耿志鹏（联培）、贺龙（联培）

研究内容

微机械超声波传感器关键技术研究；
悬臂式微纳传感器关键技术研究.

已发表论文

Yuchao Zhang, *Bin Miao(共一）*, Guanghua Wang, Xuechao Yu and Jiadong Li . ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing，micromachines,2023, 14, 516.
*Bin Miao*, Jian Zhang, Xiangzhen Ding, Dongmin Wu, Jiadong Li. Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure,J.micromech.microeng,27(2017)055019.
Zhirong Liu, Jinhui Nie, *Bin Miao*, Jiadong Li, Linlin Li, Zhong Lin Wang et al ,Self-Powered Intracellular Drug Delivery by a Biomechanical Energy-Driven Triboelectric Nanogenerator,Advanced Materials,2019,1807795.
Changkun Feng, Xiao Wang, *Bin Miao*, Zhiqi Gu, Jiadong Li*, Real-time free spectral range measurement based on a correlated resonance-tracking technology, Optics Express, 31(19):30604-30614, 2023.
Zhiqi Gu, Jin Wang, *Bin Miao*, Jiadong Li et al. Ethanolamine Modified ZnO Nanorods-Based Disposable Gate-AlGaN/GaN High Electron Mobility Transistor for pH Sensing,IEEE Sensors Journal,2020,21-3；
Xinsheng Liu, Lei Zhao, *Bin Miao*, Jiadong Li et al. Wearable Multiparameter Platform Based on AlGaN/GaN High-electron-mobility Transistors for Real-time Monitoring of pH and Potassium Ions in Sweat,electroanalysis,2020,32,422-428；
Le Gu, Shuai Yang, *Bin Miao*, Jiadong Li et al. Electrical detection of trace zinc ions with an extended gate-AlGaN/GaN high electron mobility sensor,analyst,2019,144,663-668；
Jin Wang, Zhiqi Gu, *Bin Miao*, Jiadong Li et al. etection of Multiple Samples Based on AlGaN/GaN High Electron Mobility Transistors and Magnetic Microbeads,electroanalysis,2019,31,2404-2409.